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Inline UPW/HPM Monitoring

Inline continuous element monitoring solution for semi-conductor foundry factory

OVERVIEW

Ability
Inline continuous element monitoring solution for semi-conductor foundry factory. Optimize manufactured cost and yield rate improve. Database query and remote control.
Characteristics
Metal elements detection in real time
Detection limit of pptv level
1 data per 30 minutes
Multiples sampling ports
SEMI S2 Certification
Applications
?Industry : Semiconductor / Optoelectronic
?Supply Chain : Wafer foundry Fab / Panel manufacturing Fab / Package Testing / Wafer storage
?Process : Litho / Etch / CVD / Wafer stocker / Clean room environment
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